Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.210-210
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- 1997
Characteristics of Cold Hollow Cathode Ion-Beam source for Oxygen gas
- Cho, Cho-jung (Division of Ceramics, Korea Institute of Science and Technology) ;
- Song, Song-Seok-Kyun (Division of Ceramics, Korea Institute of Science and Technology) ;
- Choi, Choi-Won-Kook (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jung, Jung-Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology) ;
- keun, Koh-Seok (Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1997.02.01
Abstract
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