Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
- /
- Pages.117-117
- /
- 1997
Effects of average energy of depositing atom on the preferred orientation and surface roughness of Cu films by PIB
- Kim, Ki-Hwan (Division of Ceramics, Korea Institute of Science and Technology) ;
- Han, Sung (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Choi, Doo-Jin
(Departments of Ceramic Engineering, Yonsei University)
;
- Choi, Sung-Chang (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Koh, Seok-Keun
(Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1997.02.01
Abstract
Keywords