Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.116-116
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- 1997
Modeling of initial growth by electric conductance variation of substrate
- Song, Seok-Kyun (Division of Ceramics, Korea Institute of Science and Technology) ;
- Cho, Jung (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Choi, Won-Kook
(Division of Ceramics, Korea Institute of Science and Technology)
;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Koh, Seok-Keun
(Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1997.02.01
Abstract
Keywords