Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.72-72
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- 1997
A study on the field emission characteristics of a-C:H thin films ppreppared by HRppECVD)
Helical Resonator PECVD를 이용한 a-C:H 박막의 전계방출특성에 관한 연구
Abstract
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