한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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- Pages.656-661
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- 1997
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- 1598-2548(pISSN)
고주파 초음파 세정기의 파동 해석
Acoustic waves in a high-frequency ultrasonic cleaner
초록
Ultrasonic cleaning at high frequency near 1MHz, called megasonic cleaning, is commonly used to remove particles less than 1.mu.m by generating accelerations on them. Ultrasonic waves generated from piezoelectric transducers are transmitted through a non-metallic inner container which is used to isolate a cleaning object from metallic ions. The transmission characteristics of a double-structured megasonic cleaner on the variations of parameters such as the thickness and oblique angle of a inner container, chemical ratio of a cleaning agent and temperature and transmittivity are investigated. The results are used to determine an optimum cleaning condition.
키워드