Acoustic waves in a high-frequency ultrasonic cleaner

고주파 초음파 세정기의 파동 해석

  • 최성훈 (삼성종합기술원 수퍼컴응용LAB) ;
  • 김진오 (삼성종합기술원 수퍼컴응용LAB) ;
  • 김용훈 (삼성전자㈜ 반도체연구소)
  • Published : 1997.04.01

Abstract

Ultrasonic cleaning at high frequency near 1MHz, called megasonic cleaning, is commonly used to remove particles less than 1.mu.m by generating accelerations on them. Ultrasonic waves generated from piezoelectric transducers are transmitted through a non-metallic inner container which is used to isolate a cleaning object from metallic ions. The transmission characteristics of a double-structured megasonic cleaner on the variations of parameters such as the thickness and oblique angle of a inner container, chemical ratio of a cleaning agent and temperature and transmittivity are investigated. The results are used to determine an optimum cleaning condition.

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