한국결정성장학회:학술대회논문집 (Proceedings of the Korea Association of Crystal Growth Conference)
- 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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- Pages.211-213
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- 1997
Characteristics of HMCZ Silicon Single Crystals
- Kimura, Masanori (SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.) ;
- Iino, Echi (SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.) ;
- Muraoka, Shozo (SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.)
- 발행 : 1997.06.01