Characteristics of HMCZ Silicon Single Crystals

  • Kimura, Masanori (SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.) ;
  • Iino, Echi (SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.) ;
  • Muraoka, Shozo (SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.)
  • Published : 1997.06.01