한국결정성장학회:학술대회논문집 (Proceedings of the Korea Association of Crystal Growth Conference)
- 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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- Pages.7-11
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- 1997
Characterization of SiC/C Functionally Gradient Materials Growth Process by CVD Technique
- Park, Chinho (Yeungnam University, School of Chemical Engineering & Technology) ;
- Lee, Jinwook (Yeungnam University, School of Chemical Engineering & Technology) ;
- Jung, Soon-Deuk (Hanyang University, Department of Chemical Engineering) ;
- Yi, Sung-Chul (Hanyang University, Department of Chemical Engineering) ;
- Kim, Yootaek (Kyonggi University, Department of Materials Science & Engineering)
- 발행 : 1997.06.01
초록
SiC/C functionally gradient material (FGMs) were formed on graphite substrates by hot-wall chemical vapor deposition (CVD) technique using the SiCl
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