Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 1997.08a
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- Pages.59-59
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- 1997
Characteristics of $SiO_xF_y$ thin films prepared by ion beam assisted deposition
이온빔 보조 증착 $SiO_xF_y$ 박막의 특성 연구
Abstract
Keywords