초록
A robust controller for a 6 DOF magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts : a model reference controller (MRC) and a H$_{\infty}$ controller (HIC). First, the MRC stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the HIC minimizes errors generated from the MRC due to noise and disturbance since the HIC is a kind of robust controller. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion, it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller..