제어로봇시스템학회:학술대회논문집
- 1997.10a
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- Pages.77-80
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- 1997
Development of Temperature Control System for Semiconductor Test Handler II - Controller Design
반도체 테스트 핸들러의 온도제어 시스템 개발 II - 제어기 설계
Abstract
In this paper presented is a temperature controller for a semiconductor test handler. Using ARMAX model and least square method, the chamber model for the design of a controller is identified through experiment. With the identified model an LQG/LTR controller is designed. Experiment with a real test handler demonstrated good performance in that its overshoot is small and response time is fast.