제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
- /
- Pages.73-76
- /
- 1997
반도체 테스트 핸들러의 온도 제어 시스템 개발 I - 시스템 구성
Development of Temperature Control Xystem for Semiconductor Test Handler I-System Design
초록
The temperature control system for semiconductor test handler is designed. We controlled the temperature of chamber using 3-wire RTD sensor and MVME EMbedded controller. VxWorks that is a real-time operating system is used and heater is controlled by PWM. Temperature fluctuation of chamber is decreased within 0.3.deg. C, which is about one-half of that of commercial controller.