The effect of surface treatment of Pl Thin Film Prepared by Electrodporetic method on the characteristics of Humidity Sensing

전기영동법에의해 제작된 Pl 박막의 표면처리 조건이 감습 특성에 미치는 영향

We prepared polyimide film by electrophoretic deposition onto glass film as a sensing materials of humidity, and treated with plasma discharging as a function of discharging power to improve performance of the sensor. Then evaluated the characteristics of polyimide on humidity.