대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 하계학술대회 논문집 C
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- Pages.1320-1322
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- 1997
대향타겟식 스퍼터로 제작된 Co-Cr 박막의 자기적 특성
The Magnetic Characteristics of Co-Cr Thin Films Deposited by Facing Targets Sputtering
초록
The distribution of coercivity in the thickness direction were investigated by using Kerr hysteresis loop tracer for the Co-Cr films deposited by Facing Targets Sputtering apparatus. It
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