대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 하계학술대회 논문집 C
- /
- Pages.1311-1313
- /
- 1997
폴리이미드를 이용한 투 칩 집적화 습도 센서
Two-Chip Integrated Humidity Sensor using Ployimide
-
Min, Nam-Ki
(Korea University) ;
-
Kim, Soo-Won
(Korea University) ;
-
Hong, Suk-In
(Korea University)
- 발행 : 1997.07.21
초록
We describe the working principle, the design, and the characteristics of two-chip integrated humidity sensor. The sensing element was manufactured using polyimide. The interface circuits were developed based on a charge redistribution between capacitors. The sensor and signal conditioning chips were packaged together in the same package. The sensor showed excellent linearity over a wide range of relative humidity.
키워드