대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 하계학술대회 논문집 C
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- Pages.1301-1303
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- 1997
공정 Simulation에 의한 Laser CVD $SiO_2$ 막 형성 기구 규명에 관한 연구
A Study on Deposition Mechanism of Laser CVD $SiO_2$ by Process Simulation
- Shin, Sang-Woo (Department of Electrical Engineering, Korea University) ;
- Lee, Sang-Kwon (Department of Electrical Engineering, Korea University) ;
- Kim, Tae-Hun (Department of Electrical Engineering, Korea University) ;
- Sung, Yung-Kwon (Department of Electrical Engineering, Korea University)
- 발행 : 1997.07.21
초록
This study was performed to investigate the deposition mechanism of
키워드