Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07e
- /
- Pages.1782-1784
- /
- 1997
Numerical Analysis of Discharge in Wire Ion Plasma Source
와이어.이온.플라즈마원의 방전현상에 관한 수치적 해석
- Song, Tae-Hun (Hanyang University) ;
- Park, Jeong-Ho (Hanyang University) ;
-
Ko, Kwang-Cheol
(Hanyang University)
;
- Kang, Hyung-Boo (Hanyang University)
- Published : 1997.07.21
Abstract
Using particle-in-cell(PIC) and Monte Carlo collision(MCC), we investigate the trajectory of electrons and the characteristics of D.C. discharge In Wire Ion Plasma Source(WIPS).
Keywords