Discharge Characteristics of Wire Ion Plasma Source

와이어.이온.플라즈마원의 방전 특성

WIPS is a plasma device which has a wire anode, a coaxially-set cylindrical cathode, and aperture electrodes located in both ends of the cylinder. This electrode configuration forces the potential between the anode and the cathode to change logarithmically with radial direction. Since electrons are confined this logarithmic potential, the high-density plasma is produced even at a rather low anode voltage. In this paper we investigate characteristics of dc and pulse discharges, in which