Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.112-112
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- 1996
Fabrication of Large Grain Sized Polycrystalline Silicon Films by Si$O_{2}$ /a-Si Nucleation-interface-Control
Si$O_{2}$ /a-Si 핵생성 계면제어에 의한 조대한 다결정 실리콘 박막의 제조
Abstract
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