Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
- /
- Pages.80-81
- /
- 1996
Growth Behavior of MOCVD-Cu on TiN Substrates Using Direct Liquid Injection Method
DLI 방법에 의한 TiN 기판상의 구리 화학증착 특성
- Jun, Chi-Hoon (Semiconductor Division, ETRI) ;
- Kim, Young-Tae (Semiconductor Division, ETRI) ;
- Baek, Jong-Tae (Semiconductor Division, ETRI) ;
- Yoo, Hyung-Joun (Semiconductor Division, ETRI) ;
- Kim, Dai-Ryong (Dept. of Metallurgical Engineering, Kyungpook National University)
- Published : 1996.11.01
Abstract
No Abstract (See Full-text)
Keywords