Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
- /
- Pages.64-64
- /
- 1996
The Evaluation of Adhesion of Pt/Ti and Pt/Tin Thin Films for a Bottom Electrode of Ferroelectric Materials
강유전체 하부전극용 Pt/Ti와 Pt/TiN 박막의 접착력 평가
Abstract
Keywords