Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.57-57
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- 1996
Characterization and electrical properties of ($Ba_{1-x}Sr_x$ )TiO$_3$ thin films by PECVD
PECVD에 의해 제조된 ($Ba_{1-x}Sr_x$ )TiO$_3$ 박막의 특성 및 전기적 성질
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