Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.52-52
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- 1996
Microstructure and Interface Reaction of RuO$_2$ thin film deposited by Rf Magnetron Sputtering
Rf Magnetron Sputtering으로 증착된 RuO$_2$ 박막의 미세구조 및 계면 반응 특성 분석
Abstract
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