Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.49-49
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- 1996
A Study on the Preparation and RTA Characteristics of RuO$_2$ Thin Films by Thermal CVD Method
Thermal CVD법에 의한 RuO$_2$ 박막의 제조와 RTA특성 관한 연구
Abstract
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