Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.2-2
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- 1996
Structural Characterization of Semiconductor Thin Film/Interface using Hihg-Resolution XRD
고분해능 XRD를 이용한 반도체 박막/계면의 구조특성 분석
Abstract
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