Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.82-82
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- 1996
Measurements of residual stress gradients and Young's modulus for polycrystalline silicon beam using a $\alpha$ -step
$\alpha$ -step을 이용한 다결정 실리콘 빔의 잔류응력 기울기와 탄성계수 측정
Abstract
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