Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.74-74
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- 1996
The Effect of the Hydrophobicity of Silicon Surface on the Formation of the Water Marks during HF-last Wet Chemical Processing
반도체 습식 HF 최종공정 중 실리콘 표면의 소수성이 Water Mark 생성에 미치는 영향
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