Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.61-61
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- 1996
Effect of Ti deposition temperature on $TiSi_2$ orientation and its thermal instability in heavily doped Si
Heavily doped Si에서 Ti 증착 온도가 $TiSi_2$ orientation 및 thermal instability 에 미치는 영향
Abstract
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