Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.53-53
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- 1996
Effect of deposition conditions on physical properties and stresses of (Al, Sr)$_{1-x}O_x$ and Pt thin films
증착조건이 (Al, Sr)$_{1-x}O_x$ 박막과 Pt박막의 물성 및 응력변화에 미치는 영향
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