Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.51-51
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- 1996
The Role of Buffer Layer and Deposition of Heteroepitaxial $\beta$ -Sic Thin Films using Organosilicon Precursor
유기실리콘화합물 원료를 이용한 $\beta$ -Sic 단결성 박막 성장 및 버퍼층의 역할
- Published : 1996.05.01
Abstract
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