Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.49-49
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- 1996
A study on the properties of amporphous carbon nitride films prepared by Helical Resonator plasma enhanced chemical vapor deposition
Helical Resonator 플라즈마 화학증착으로 제조한 Carbon Nitride 박막의 특성평가
Abstract
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