Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.39-39
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- 1996
DEFENDENCE OF PROPERTIES OF THE AL-DOPED ZNO THIN FILMS DEPOSITED BY RF MAGNTRON SPUTTER ON SPUTTERING TARGET DENSITY
rf 마그네트론 스퍼터링법에 의해 증착한 Al 첨가된 ZnO 박막의 스퍼터링 타게트 밀도에 따른 물성의 의존성
- Kim, Jin-Yong (School of Materials Engineering, Seoul National University) ;
- Lee, Yong-Eui (School of Materials Engineering, Seoul National University) ;
- Kim, Young-Jin (Department of Materials Engineering, Kyonggi University) ;
- Kim, Hyeong-Joon (Department of Materials Engineering, Kyonggi University)
- Published : 1996.05.01
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