한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1996년도 재료학회 춘계학술발표회
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- Pages.10-10
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- 1996
Feasibilities of TiNx in ULSI fabrication process (Formation of the large grain sized TiN layer on SiO$_2$ substrate and teh epitaxial C49-TiSi$_2$ formation on (100) Si substrate)
- Byun, Jeong-Soo (ULSI Research Center of LG Semicon Co. Ltd) ;
- Park, Jin-Won (ULSI Research Center of LG Semicon Co. Ltd) ;
- Kim, Jae-Jeong (ULSI Research Center of LG Semicon Co. Ltd)
- 발행 : 1996.05.01