한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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- Pages.9-14
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- 1996
열처리 조건에 따른 Ag-In-Sb-Te 상변화 기록 박막의 미세 조직과 반사도의 관계
Dependence of Microstructure and Optical Properties of Ag-In-Sb-Te Phase-Change Recording Thin Firms on Annealing Heat-Treatments
- Seo, H. (Devices & Materials Research Lab.,LG Electronics Research Center) ;
- Park, J. W. (Devices & Materials Research Lab.,LG Electronics Research Center) ;
- Choi, W. S. (Devices & Materials Research Lab.,LG Electronics Research Center) ;
- Kim, M. R. (Devices & Materials Research Lab.,LG Electronics Research Center)
- 발행 : 1996.05.01
초록
The dependence of microstructural and optical properties of Ag-In-Sb-Te thin films on annealing heat-treatments was studied. It was found from the present work that the increase of reflectance after annealing heat-treatment is related with phase change of Ag-In-Sb-Te thin film from amorphous state to crystalline phases which involve Sb crystalline phase and AgInTe
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