한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1996년도 추계학술대회 논문집
- /
- Pages.13-17
- /
- 1996
비휘발성 반도체 기억소자를 위한 Oxide-Nitride-Oxide 초박막의 특성
Characteristics of Oxide-Nitride-Oxide Superthin Films for Nonvolatile Semiconductor Memory Devices
초록
Superthin ONO ( oxide -nitride - oxide ) structures were fabricated for the MONOS nonvolatile memory device with a 20
키워드