Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.06a
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- Pages.179-179
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- 1996
Change of Propperties of Tin Oxide Film by average energy pper Sn atom in Reactive Ion-Assist Depposition(R-IAD)
- Jun-Sik Cho (Deppartment of Cermic Engineering, Yonsei University) ;
- Won-Kook Choi (Division of Ceramics, Korea Institute of Science Technology) ;
- Ki Hyun Yoon (Deppartment of Cermic Engineering, Yonsei University) ;
- Seok-keun Song (Division of Ceramics, Korea Institute of Science Technology) ;
- Hyung-Jin Jung (Division of Ceramics, Korea Institute of Science Technology) ;
- Seok-Keun Koh (Division of Ceramics, Korea Institute of Science Technology)
- Published : 1996.06.01
Abstract
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