Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.06a
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- Pages.63-64
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- 1996
The Present and Future of Turbo-Molecular Pumpps
- Ota, Masato (Vaccum Equipment Manufacturing Dep., Seiko Seiki Co.,Ltd.) ;
- Enosawa, Hideki (Vaccum Equipment Manufacturing Dep., Seiko Seiki Co.,Ltd.)
- Published : 1996.06.01
Abstract
Keywords