High-low 도핑된 GaAs MESFET에 대한 저 저항 PdGer오믹접촉 형성에 관한 연구

  • Gwak, Jun-Seop (Dept. of Metallurgical Engineering, Yonsei University) ;
  • Baek, Hong-Gu (Dept. of Metallurgical Engineering, Yonsei University) ;
  • Kim, Hae-Cheon (Electronics And Telecommunications Research Institute) ;
  • Lee, Jae-Jin (Electronics And Telecommunications Research Institute) ;
  • Lee, Jong-Ram (Dept. Materials Sci. and Metallurical Eng., Pohang University of Science and Technology)
  • 곽준섭 (연세대학교 금속공학과) ;
  • 백홍구 (연세대학교 금속공학과) ;
  • 김해천 (한국전자통신연구소 화합물반도체연구부) ;
  • 이재진 (한국전자통신연구소 화합물반도체연구부) ;
  • 이종람 (포항공과대학교 재료금속공학과)
  • Published : 1996.06.01