Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
권호 표지

Heteroepitaxial Growth of Silicon Carbide Thin Films by High Vacuum Chemical Vapor Deposition Using the Single precursor 1,3-Disilabutane

  • Kim, Yunsoo (Thin Film Materials Laboratory Inorganic Materials Division Korea Research Institute of Chemical Technology)
  • Published : 1996.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords