한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1996년도 제10회 학술발표회 논문개요집
- /
- Pages.180-180
- /
- 1996
$CsX^+$ CLUSTER METHOD FOR PHOSPHORUS ppROFILE MEASUREMENT IN THE POLY $Si/SiO_2$ SYSTEM
- Kim, D.W. (Analysis & Evaluation Technology Team, Semiconductor Business, Samsung Electronics) ;
- Jung, J.K. (Analysis & Evaluation Technology Team, Semiconductor Business, Samsung Electronics) ;
- Baek, D.H. (Analysis & Evaluation Technology Team, Semiconductor Business, Samsung Electronics)
- 발행 : 1996.02.01