Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Extraction Efficiency of Cu Ion on CZ Si Surface by Scanning Solution

  • Cho, K.C. (Samsung Electronics) ;
  • Park, J.M. (Samsung Electronics) ;
  • Lee, Y.G. (Samsung Electronics) ;
  • Kang, S.C
  • Published : 1996.02.01
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