Investigation of as-grown and annealed characteristics of a SiGe/Si heterostructure by structural and compositional analyses

  • Lee, Kyung-Ho (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
  • Yun, Sun-Jin (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
  • Lee, Seung-Chang (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
  • Lee, Joong-Whan (Semiconductor Technology Division, Electronics and Telecommunications Research Institute)
  • 발행 : 1996.02.01