Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.175-175
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- 1996
Investigation of as-grown and annealed characteristics of a SiGe/Si heterostructure by structural and compositional analyses
- Lee, Kyung-Ho (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Yun, Sun-Jin (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Lee, Seung-Chang (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Lee, Joong-Whan (Semiconductor Technology Division, Electronics and Telecommunications Research Institute)
- Published : 1996.02.01
Abstract
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