Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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XPS and SHG Analysis of Initial Oxidation of Si(111) with Ozone

  • S.Ichimura (Electrotechnical Laboratory/Surface Engineering Section) ;
  • A.Kurokawa (Electrotechnical Laboratory/Surface Engineering Section) ;
  • K.Nakamura (Electrotechnical Laboratory/Surface Engineering Section)
  • Published : 1996.02.01
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