Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.136-136
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- 1996
산소 이온 빔에 의한 실리콘 산화 과정의 in-situ MEIS 분석
- Kim, Yeong-Pil (Dept. of Materials Engineering, Korea Advanced Institute of Science and Technology) ;
- Choe, Si-Gyeong (Dept. of Materials Engineering, Korea Advanced Institute of Science and Technology) ;
- Ha, Yong-Ho (Korea Advanced Institute of Science and Technology) ;
- Kim, Se-Hun (Korea Advanced Institute of Science and Technology) ;
- Kim, Hyeon-Gyeong (Korea Reserch Institute of Standards and Science)
- 김영필 (한국과학기술원 재료공학과) ;
- 최시경 (한국과학기술원 재료공학과) ;
- 하용호 (한국과학기술원 화학과) ;
- 김세훈 (한국과학기술원 화학과) ;
- 김현경 (한국표준과학연구원 표면분석그룹)
- Published : 1996.02.01
Abstract
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