Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Surface Structure of TiN Films by Ion Beam Processing

  • Min, Kyung-youl (Surface and Interface Division, National Research Insititute for Metals, Tsukuba) ;
  • KazuhiroYoshihara (Surface and Interface Division, National Research Insititute for Metals, Tsukuba) ;
  • RyuichiShimizu (Department of Applied Physics, Osaka University)
  • Published : 1996.02.01
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