Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.127-127
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- 1996
STM Analysis of Site Selectivity in the Initial Oxidation of Si
- Ha, Jeong Sook (Research Deppartment, Electronics and Telecommunications Research Institute) ;
- Park, Kang-Ho (Research Deppartment, Electronics and Telecommunications Research Institute) ;
- Park, Seong (Deppartment of Materials Science and Engineering, Kwangju Institute of Science and Technology)
- Published : 1996.02.01
Abstract
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