Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.87-87
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- 1996
Deposition of Cu films on Si substrate by Partially Ionezed Beam deposition and Ion beam sputtering
- Kim, Ki-Hwan (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jang, Hong-Gui (Division of Ceramics, Korea Institute of Science and Technology) ;
- Han, Sung (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Choi, Doo-Jin
(Department of Ceramic Engineering, Yonsei University)
;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Koh, Seok-Keun
(Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1996.02.01
Abstract
Keywords