Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Preparation and Characterization of Thin Oxide Film Deposited by Ion-Assist-Deposition(IAD)

  • Cho, Jun-Sik (Division of Ceramics, Korea Institute of Science Technology) ;
  • Choi, Won-Kook (Division of Ceramics, Korea Institute of Science Technology) ;
  • Yoon, Ki-Hyun (Department of Ceramic Engineering, Yonsei University) ;
  • Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science Technology)
  • Published : 1996.02.01
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